Query failed: Your query returned no data

I'm running UAC at google ads.

There are campaign, ad group, conversion type.

I tried to load data but I could see "Query failed: Your query returned no data"

I could find problems at "split by dimension

When I entered "date, campaign name, ad group name, conversion type" in split by dimension" -> no data

When I entered "date, campaign name" in split by dimension" -> there are data

When I entered "date, ad group name" in split by dimension" -> no data

When I entered "date, conversion type" in split by dimension" -> no data

We can't run ad without ad group name and there are no conversion without conversion type. So, ad group name and conversion type must be exist. But, supermetrics can't load data if I enter ad group name and conversion type in split by dimension.